8/21/2010	12:34:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2010	12:34:57 PM	Recipe started at 12:34 PM
8/21/2010	12:34:57 PM	H2 valve closed
8/21/2010	12:34:57 PM	BCl3 valve closed
8/21/2010	12:34:57 PM	PH3 valve closed
8/21/2010	12:34:57 PM	SiCl4 pre valve closed
8/21/2010	12:34:57 PM	SiCl4 post valve closed
8/21/2010	12:34:57 PM	Main Vac valve closed
8/21/2010	12:34:57 PM	Bypass valve closed
8/21/2010	12:34:57 PM	Bubbler valve closed
8/21/2010	12:34:57 PM	Helium valve opened
8/21/2010	12:34:57 PM	Helium MFC set to  500.000000
8/21/2010	12:34:57 PM	H2 MFC set to  0.000000
8/21/2010	12:34:57 PM	BCl3 MFC set to  0.000000
8/21/2010	12:34:57 PM	PHl3 MFC set to  0.000000
8/21/2010	12:34:57 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:34:57 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:34:57 PM	Tube furnace set to 0
8/21/2010	12:36:16 PM	Helium valve closed
8/21/2010	12:36:16 PM	H2 valve closed
8/21/2010	12:36:16 PM	BCl3 valve closed
8/21/2010	12:36:16 PM	PH3 valve closed
8/21/2010	12:36:16 PM	SiCl4 pre valve closed
8/21/2010	12:36:16 PM	SiCl4 post valve closed
8/21/2010	12:36:16 PM	Main Vac valve closed
8/21/2010	12:36:16 PM	Bypass valve closed
8/21/2010	12:36:16 PM	Bubbler valve closed
8/21/2010	12:36:16 PM	Helium MFC set to  0.000000
8/21/2010	12:36:16 PM	H2 MFC set to  0.000000
8/21/2010	12:36:16 PM	BCl3 MFC set to  0.000000
8/21/2010	12:36:16 PM	PHl3 MFC set to  0.000000
8/21/2010	12:36:16 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:36:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:36:16 PM	Tube furnace set to 0
8/21/2010	12:36:16 PM	Run finished at 12:36 PM
8/21/2010	12:36:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/21/2010	12:46:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2010	12:46:59 PM	Recipe started at 12:46 PM
8/21/2010	12:46:59 PM	Helium valve closed
8/21/2010	12:46:59 PM	H2 valve closed
8/21/2010	12:46:59 PM	BCl3 valve closed
8/21/2010	12:46:59 PM	PH3 valve closed
8/21/2010	12:46:59 PM	SiCl4 pre valve closed
8/21/2010	12:46:59 PM	SiCl4 post valve closed
8/21/2010	12:46:59 PM	Main Vac valve closed
8/21/2010	12:46:59 PM	Bubbler valve closed
8/21/2010	12:46:59 PM	Bypass valve opened
8/21/2010	12:46:59 PM	Helium MFC set to  0.000000
8/21/2010	12:46:59 PM	H2 MFC set to  0.000000
8/21/2010	12:46:59 PM	BCl3 MFC set to  0.000000
8/21/2010	12:46:59 PM	PHl3 MFC set to  0.000000
8/21/2010	12:46:59 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:46:59 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:46:59 PM	Tube furnace set to 0
8/21/2010	12:47:51 PM	Helium valve closed
8/21/2010	12:47:51 PM	H2 valve closed
8/21/2010	12:47:51 PM	BCl3 valve closed
8/21/2010	12:47:51 PM	PH3 valve closed
8/21/2010	12:47:51 PM	SiCl4 pre valve closed
8/21/2010	12:47:51 PM	SiCl4 post valve closed
8/21/2010	12:47:51 PM	Bubbler valve closed
8/21/2010	12:47:51 PM	Main Vac valve opened
8/21/2010	12:47:51 PM	Bypass valve opened
8/21/2010	12:47:51 PM	Helium MFC set to  0.000000
8/21/2010	12:47:51 PM	H2 MFC set to  0.000000
8/21/2010	12:47:51 PM	BCl3 MFC set to  0.000000
8/21/2010	12:47:51 PM	PHl3 MFC set to  0.000000
8/21/2010	12:47:51 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:47:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:47:51 PM	Tube furnace set to 0
8/21/2010	12:47:51 PM	Run finished at 12:47 PM
8/21/2010	12:47:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2010	12:49:49 PM	Bypass valve closed
8/21/2010	12:49:51 PM	Main Vac valve closed
8/21/2010	12:49:59 PM	Main Vac valve opened
8/21/2010	12:50:00 PM	Bypass valve opened
8/21/2010	12:50:18 PM	Bypass valve closed
8/21/2010	12:50:20 PM	Main Vac valve closed
8/21/2010	12:50:26 PM	Main Vac valve opened
8/21/2010	12:51:56 PM	Main Vac valve closed
8/21/2010	12:52:05 PM	Main Vac valve opened
8/21/2010	12:53:15 PM	Main Vac valve closed
8/21/2010	12:53:31 PM	Main Vac valve opened
8/21/2010	12:53:34 PM	Bypass valve opened
8/21/2010	12:53:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/21/2010	12:53:43 PM	Recipe started at 12:53 PM
8/21/2010	12:53:43 PM	H2 valve closed
8/21/2010	12:53:43 PM	BCl3 valve closed
8/21/2010	12:53:43 PM	PH3 valve closed
8/21/2010	12:53:43 PM	SiCl4 pre valve closed
8/21/2010	12:53:43 PM	SiCl4 post valve closed
8/21/2010	12:53:43 PM	Main Vac valve closed
8/21/2010	12:53:43 PM	Bypass valve closed
8/21/2010	12:53:43 PM	Bubbler valve closed
8/21/2010	12:53:43 PM	Helium valve opened
8/21/2010	12:53:43 PM	Helium MFC set to  500.000000
8/21/2010	12:53:44 PM	H2 MFC set to  0.000000
8/21/2010	12:53:44 PM	BCl3 MFC set to  0.000000
8/21/2010	12:53:44 PM	PHl3 MFC set to  0.000000
8/21/2010	12:53:44 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:53:44 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:53:44 PM	Tube furnace set to 0
8/21/2010	12:55:06 PM	Helium valve closed
8/21/2010	12:55:06 PM	H2 valve closed
8/21/2010	12:55:06 PM	BCl3 valve closed
8/21/2010	12:55:06 PM	PH3 valve closed
8/21/2010	12:55:06 PM	SiCl4 pre valve closed
8/21/2010	12:55:06 PM	SiCl4 post valve closed
8/21/2010	12:55:06 PM	Main Vac valve closed
8/21/2010	12:55:06 PM	Bypass valve closed
8/21/2010	12:55:06 PM	Bubbler valve closed
8/21/2010	12:55:06 PM	Helium MFC set to  0.000000
8/21/2010	12:55:06 PM	H2 MFC set to  0.000000
8/21/2010	12:55:06 PM	BCl3 MFC set to  0.000000
8/21/2010	12:55:06 PM	PHl3 MFC set to  0.000000
8/21/2010	12:55:06 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:55:06 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:55:06 PM	Tube furnace set to 0
8/21/2010	12:55:21 PM	Helium valve closed
8/21/2010	12:55:21 PM	H2 valve closed
8/21/2010	12:55:21 PM	BCl3 valve closed
8/21/2010	12:55:21 PM	PH3 valve closed
8/21/2010	12:55:21 PM	SiCl4 pre valve closed
8/21/2010	12:55:21 PM	SiCl4 post valve closed
8/21/2010	12:55:21 PM	Main Vac valve closed
8/21/2010	12:55:21 PM	Bubbler valve closed
8/21/2010	12:55:21 PM	Bypass valve opened
8/21/2010	12:55:21 PM	Helium MFC set to  0.000000
8/21/2010	12:55:21 PM	H2 MFC set to  0.000000
8/21/2010	12:55:21 PM	BCl3 MFC set to  0.000000
8/21/2010	12:55:21 PM	PHl3 MFC set to  0.000000
8/21/2010	12:55:21 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:55:21 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:55:21 PM	Tube furnace set to 0
8/21/2010	12:55:50 PM	Helium valve closed
8/21/2010	12:55:50 PM	H2 valve closed
8/21/2010	12:55:50 PM	BCl3 valve closed
8/21/2010	12:55:50 PM	PH3 valve closed
8/21/2010	12:55:50 PM	SiCl4 pre valve closed
8/21/2010	12:55:50 PM	SiCl4 post valve closed
8/21/2010	12:55:50 PM	Bubbler valve closed
8/21/2010	12:55:50 PM	Main Vac valve opened
8/21/2010	12:55:50 PM	Bypass valve opened
8/21/2010	12:55:50 PM	Helium MFC set to  0.000000
8/21/2010	12:55:50 PM	H2 MFC set to  0.000000
8/21/2010	12:55:50 PM	BCl3 MFC set to  0.000000
8/21/2010	12:55:50 PM	PHl3 MFC set to  0.000000
8/21/2010	12:55:50 PM	SiCl4 MFC set to  0.000000
8/21/2010	12:55:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	12:55:50 PM	Tube furnace set to 0
8/21/2010	1:00:50 PM	H2 valve closed
8/21/2010	1:00:50 PM	BCl3 valve closed
8/21/2010	1:00:50 PM	PH3 valve closed
8/21/2010	1:00:50 PM	SiCl4 pre valve closed
8/21/2010	1:00:50 PM	SiCl4 post valve closed
8/21/2010	1:00:50 PM	Main Vac valve closed
8/21/2010	1:00:50 PM	Bypass valve closed
8/21/2010	1:00:50 PM	Bubbler valve closed
8/21/2010	1:00:50 PM	Helium valve opened
8/21/2010	1:00:50 PM	Helium MFC set to  500.000000
8/21/2010	1:00:50 PM	H2 MFC set to  0.000000
8/21/2010	1:00:50 PM	BCl3 MFC set to  0.000000
8/21/2010	1:00:50 PM	PHl3 MFC set to  0.000000
8/21/2010	1:00:50 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:00:50 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:00:50 PM	Tube furnace set to 0
8/21/2010	1:02:12 PM	Helium valve closed
8/21/2010	1:02:12 PM	H2 valve closed
8/21/2010	1:02:12 PM	BCl3 valve closed
8/21/2010	1:02:12 PM	PH3 valve closed
8/21/2010	1:02:12 PM	SiCl4 pre valve closed
8/21/2010	1:02:12 PM	SiCl4 post valve closed
8/21/2010	1:02:12 PM	Main Vac valve closed
8/21/2010	1:02:12 PM	Bypass valve closed
8/21/2010	1:02:12 PM	Bubbler valve closed
8/21/2010	1:02:12 PM	Helium MFC set to  0.000000
8/21/2010	1:02:12 PM	H2 MFC set to  0.000000
8/21/2010	1:02:12 PM	BCl3 MFC set to  0.000000
8/21/2010	1:02:12 PM	PHl3 MFC set to  0.000000
8/21/2010	1:02:12 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:02:12 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:02:12 PM	Tube furnace set to 0
8/21/2010	1:02:27 PM	Helium valve closed
8/21/2010	1:02:27 PM	H2 valve closed
8/21/2010	1:02:27 PM	BCl3 valve closed
8/21/2010	1:02:27 PM	PH3 valve closed
8/21/2010	1:02:27 PM	SiCl4 pre valve closed
8/21/2010	1:02:27 PM	SiCl4 post valve closed
8/21/2010	1:02:27 PM	Main Vac valve closed
8/21/2010	1:02:27 PM	Bubbler valve closed
8/21/2010	1:02:27 PM	Bypass valve opened
8/21/2010	1:02:27 PM	Helium MFC set to  0.000000
8/21/2010	1:02:27 PM	H2 MFC set to  0.000000
8/21/2010	1:02:27 PM	BCl3 MFC set to  0.000000
8/21/2010	1:02:27 PM	PHl3 MFC set to  0.000000
8/21/2010	1:02:27 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:02:27 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:02:28 PM	Tube furnace set to 0
8/21/2010	1:02:56 PM	Helium valve closed
8/21/2010	1:02:56 PM	H2 valve closed
8/21/2010	1:02:56 PM	BCl3 valve closed
8/21/2010	1:02:56 PM	PH3 valve closed
8/21/2010	1:02:56 PM	SiCl4 pre valve closed
8/21/2010	1:02:56 PM	SiCl4 post valve closed
8/21/2010	1:02:56 PM	Bubbler valve closed
8/21/2010	1:02:56 PM	Main Vac valve opened
8/21/2010	1:02:56 PM	Bypass valve opened
8/21/2010	1:02:56 PM	Helium MFC set to  0.000000
8/21/2010	1:02:56 PM	H2 MFC set to  0.000000
8/21/2010	1:02:56 PM	BCl3 MFC set to  0.000000
8/21/2010	1:02:56 PM	PHl3 MFC set to  0.000000
8/21/2010	1:02:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:02:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:02:56 PM	Tube furnace set to 0
8/21/2010	1:07:56 PM	H2 valve closed
8/21/2010	1:07:56 PM	BCl3 valve closed
8/21/2010	1:07:56 PM	PH3 valve closed
8/21/2010	1:07:56 PM	SiCl4 pre valve closed
8/21/2010	1:07:56 PM	SiCl4 post valve closed
8/21/2010	1:07:56 PM	Main Vac valve closed
8/21/2010	1:07:56 PM	Bypass valve closed
8/21/2010	1:07:56 PM	Bubbler valve closed
8/21/2010	1:07:56 PM	Helium valve opened
8/21/2010	1:07:56 PM	Helium MFC set to  500.000000
8/21/2010	1:07:56 PM	H2 MFC set to  0.000000
8/21/2010	1:07:56 PM	BCl3 MFC set to  0.000000
8/21/2010	1:07:56 PM	PHl3 MFC set to  0.000000
8/21/2010	1:07:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:07:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:07:56 PM	Tube furnace set to 0
8/21/2010	1:09:19 PM	Helium valve closed
8/21/2010	1:09:19 PM	H2 valve closed
8/21/2010	1:09:19 PM	BCl3 valve closed
8/21/2010	1:09:19 PM	PH3 valve closed
8/21/2010	1:09:19 PM	SiCl4 pre valve closed
8/21/2010	1:09:19 PM	SiCl4 post valve closed
8/21/2010	1:09:19 PM	Main Vac valve closed
8/21/2010	1:09:19 PM	Bypass valve closed
8/21/2010	1:09:19 PM	Bubbler valve closed
8/21/2010	1:09:19 PM	Helium MFC set to  0.000000
8/21/2010	1:09:19 PM	H2 MFC set to  0.000000
8/21/2010	1:09:19 PM	BCl3 MFC set to  0.000000
8/21/2010	1:09:19 PM	PHl3 MFC set to  0.000000
8/21/2010	1:09:19 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:09:19 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:09:19 PM	Tube furnace set to 0
8/21/2010	1:09:34 PM	Helium valve closed
8/21/2010	1:09:34 PM	H2 valve closed
8/21/2010	1:09:34 PM	BCl3 valve closed
8/21/2010	1:09:34 PM	PH3 valve closed
8/21/2010	1:09:34 PM	SiCl4 pre valve closed
8/21/2010	1:09:34 PM	SiCl4 post valve closed
8/21/2010	1:09:34 PM	Main Vac valve closed
8/21/2010	1:09:34 PM	Bubbler valve closed
8/21/2010	1:09:34 PM	Bypass valve opened
8/21/2010	1:09:34 PM	Helium MFC set to  0.000000
8/21/2010	1:09:34 PM	H2 MFC set to  0.000000
8/21/2010	1:09:34 PM	BCl3 MFC set to  0.000000
8/21/2010	1:09:34 PM	PHl3 MFC set to  0.000000
8/21/2010	1:09:34 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:09:34 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:09:34 PM	Tube furnace set to 0
8/21/2010	1:10:02 PM	Helium valve closed
8/21/2010	1:10:02 PM	H2 valve closed
8/21/2010	1:10:02 PM	BCl3 valve closed
8/21/2010	1:10:02 PM	PH3 valve closed
8/21/2010	1:10:02 PM	SiCl4 pre valve closed
8/21/2010	1:10:02 PM	SiCl4 post valve closed
8/21/2010	1:10:02 PM	Bubbler valve closed
8/21/2010	1:10:02 PM	Main Vac valve opened
8/21/2010	1:10:02 PM	Bypass valve opened
8/21/2010	1:10:02 PM	Helium MFC set to  0.000000
8/21/2010	1:10:02 PM	H2 MFC set to  0.000000
8/21/2010	1:10:02 PM	BCl3 MFC set to  0.000000
8/21/2010	1:10:02 PM	PHl3 MFC set to  0.000000
8/21/2010	1:10:02 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:10:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:10:03 PM	Tube furnace set to 0
8/21/2010	1:15:03 PM	Helium valve closed
8/21/2010	1:15:03 PM	H2 valve closed
8/21/2010	1:15:03 PM	BCl3 valve closed
8/21/2010	1:15:03 PM	PH3 valve closed
8/21/2010	1:15:03 PM	SiCl4 pre valve closed
8/21/2010	1:15:03 PM	SiCl4 post valve closed
8/21/2010	1:15:03 PM	Bubbler valve closed
8/21/2010	1:15:03 PM	Main Vac valve opened
8/21/2010	1:15:03 PM	Bypass valve opened
8/21/2010	1:15:03 PM	Helium MFC set to  0.000000
8/21/2010	1:15:03 PM	H2 MFC set to  0.000000
8/21/2010	1:15:03 PM	BCl3 MFC set to  0.000000
8/21/2010	1:15:03 PM	PHl3 MFC set to  0.000000
8/21/2010	1:15:03 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:15:03 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:15:03 PM	Tube furnace set to 0
8/21/2010	1:15:04 PM	Run finished at 1:15 PM
8/21/2010	1:15:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/21/2010	1:36:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/21/2010	1:36:56 PM	Recipe started at 1:36 PM
8/21/2010	1:36:56 PM	Helium valve closed
8/21/2010	1:36:56 PM	H2 valve closed
8/21/2010	1:36:56 PM	BCl3 valve closed
8/21/2010	1:36:56 PM	PH3 valve closed
8/21/2010	1:36:56 PM	SiCl4 pre valve closed
8/21/2010	1:36:56 PM	SiCl4 post valve closed
8/21/2010	1:36:56 PM	Main Vac valve closed
8/21/2010	1:36:56 PM	Bubbler valve closed
8/21/2010	1:36:56 PM	Bypass valve opened
8/21/2010	1:36:56 PM	Helium MFC set to  0.000000
8/21/2010	1:36:56 PM	H2 MFC set to  0.000000
8/21/2010	1:36:56 PM	BCl3 MFC set to  0.000000
8/21/2010	1:36:56 PM	PHl3 MFC set to  0.000000
8/21/2010	1:36:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:36:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:36:56 PM	Tube furnace set to 0
8/21/2010	1:36:56 PM	Helium valve closed
8/21/2010	1:36:56 PM	H2 valve closed
8/21/2010	1:36:56 PM	BCl3 valve closed
8/21/2010	1:36:56 PM	PH3 valve closed
8/21/2010	1:36:56 PM	SiCl4 pre valve closed
8/21/2010	1:36:56 PM	SiCl4 post valve closed
8/21/2010	1:36:56 PM	Bubbler valve closed
8/21/2010	1:36:56 PM	Main Vac valve opened
8/21/2010	1:36:56 PM	Bypass valve opened
8/21/2010	1:36:56 PM	Helium MFC set to  0.000000
8/21/2010	1:36:56 PM	H2 MFC set to  0.000000
8/21/2010	1:36:56 PM	BCl3 MFC set to  0.000000
8/21/2010	1:36:56 PM	PHl3 MFC set to  0.000000
8/21/2010	1:36:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:36:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:36:56 PM	Tube furnace set to 0
8/21/2010	1:37:56 PM	H2 valve closed
8/21/2010	1:37:56 PM	BCl3 valve closed
8/21/2010	1:37:56 PM	PH3 valve closed
8/21/2010	1:37:56 PM	SiCl4 pre valve closed
8/21/2010	1:37:56 PM	SiCl4 post valve closed
8/21/2010	1:37:56 PM	Bubbler valve closed
8/21/2010	1:37:56 PM	Helium valve opened
8/21/2010	1:37:56 PM	Main Vac valve opened
8/21/2010	1:37:56 PM	Bypass valve opened
8/21/2010	1:37:56 PM	Helium MFC set to  100.000000
8/21/2010	1:37:56 PM	H2 MFC set to  0.000000
8/21/2010	1:37:56 PM	BCl3 MFC set to  0.000000
8/21/2010	1:37:56 PM	PHl3 MFC set to  0.000000
8/21/2010	1:37:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:37:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:37:57 PM	Tube furnace set to 0
8/21/2010	1:46:57 PM	Helium valve closed
8/21/2010	1:46:57 PM	H2 valve closed
8/21/2010	1:46:57 PM	BCl3 valve closed
8/21/2010	1:46:57 PM	PH3 valve closed
8/21/2010	1:46:57 PM	SiCl4 pre valve closed
8/21/2010	1:46:57 PM	SiCl4 post valve closed
8/21/2010	1:46:57 PM	Bubbler valve closed
8/21/2010	1:46:57 PM	Main Vac valve opened
8/21/2010	1:46:57 PM	Bypass valve opened
8/21/2010	1:46:57 PM	Helium MFC set to  0.000000
8/21/2010	1:46:57 PM	H2 MFC set to  0.000000
8/21/2010	1:46:57 PM	BCl3 MFC set to  0.000000
8/21/2010	1:46:57 PM	PHl3 MFC set to  0.000000
8/21/2010	1:46:57 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:46:57 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:46:57 PM	Tube furnace set to 0
8/21/2010	1:47:57 PM	H2 valve closed
8/21/2010	1:47:57 PM	BCl3 valve closed
8/21/2010	1:47:57 PM	PH3 valve closed
8/21/2010	1:47:57 PM	SiCl4 pre valve closed
8/21/2010	1:47:57 PM	SiCl4 post valve closed
8/21/2010	1:47:57 PM	Bubbler valve closed
8/21/2010	1:47:57 PM	Helium valve opened
8/21/2010	1:47:57 PM	Main Vac valve opened
8/21/2010	1:47:57 PM	Bypass valve opened
8/21/2010	1:47:57 PM	Helium MFC set to  100.000000
8/21/2010	1:47:57 PM	H2 MFC set to  0.000000
8/21/2010	1:47:57 PM	BCl3 MFC set to  0.000000
8/21/2010	1:47:57 PM	PHl3 MFC set to  0.000000
8/21/2010	1:47:57 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:47:57 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:47:57 PM	Tube furnace set to 0
8/21/2010	1:56:57 PM	Helium valve closed
8/21/2010	1:56:57 PM	H2 valve closed
8/21/2010	1:56:57 PM	BCl3 valve closed
8/21/2010	1:56:57 PM	PH3 valve closed
8/21/2010	1:56:57 PM	SiCl4 pre valve closed
8/21/2010	1:56:57 PM	SiCl4 post valve closed
8/21/2010	1:56:57 PM	Bubbler valve closed
8/21/2010	1:56:57 PM	Main Vac valve opened
8/21/2010	1:56:57 PM	Bypass valve opened
8/21/2010	1:56:57 PM	Helium MFC set to  0.000000
8/21/2010	1:56:57 PM	H2 MFC set to  0.000000
8/21/2010	1:56:57 PM	BCl3 MFC set to  0.000000
8/21/2010	1:56:57 PM	PHl3 MFC set to  0.000000
8/21/2010	1:56:57 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:56:57 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:56:57 PM	Tube furnace set to 0
8/21/2010	1:57:57 PM	H2 valve closed
8/21/2010	1:57:57 PM	BCl3 valve closed
8/21/2010	1:57:57 PM	PH3 valve closed
8/21/2010	1:57:57 PM	SiCl4 pre valve closed
8/21/2010	1:57:57 PM	SiCl4 post valve closed
8/21/2010	1:57:57 PM	Bubbler valve closed
8/21/2010	1:57:57 PM	Helium valve opened
8/21/2010	1:57:57 PM	Main Vac valve opened
8/21/2010	1:57:57 PM	Bypass valve opened
8/21/2010	1:57:57 PM	Helium MFC set to  100.000000
8/21/2010	1:57:57 PM	H2 MFC set to  0.000000
8/21/2010	1:57:57 PM	BCl3 MFC set to  0.000000
8/21/2010	1:57:57 PM	PHl3 MFC set to  0.000000
8/21/2010	1:57:57 PM	SiCl4 MFC set to  0.000000
8/21/2010	1:57:57 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	1:57:57 PM	Tube furnace set to 0
8/21/2010	2:06:57 PM	Helium valve closed
8/21/2010	2:06:57 PM	H2 valve closed
8/21/2010	2:06:57 PM	BCl3 valve closed
8/21/2010	2:06:57 PM	PH3 valve closed
8/21/2010	2:06:57 PM	SiCl4 pre valve closed
8/21/2010	2:06:57 PM	SiCl4 post valve closed
8/21/2010	2:06:57 PM	Bubbler valve closed
8/21/2010	2:06:57 PM	Main Vac valve opened
8/21/2010	2:06:57 PM	Bypass valve opened
8/21/2010	2:06:57 PM	Helium MFC set to  0.000000
8/21/2010	2:06:57 PM	H2 MFC set to  0.000000
8/21/2010	2:06:57 PM	BCl3 MFC set to  0.000000
8/21/2010	2:06:58 PM	PHl3 MFC set to  0.000000
8/21/2010	2:06:58 PM	SiCl4 MFC set to  0.000000
8/21/2010	2:06:58 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	2:06:58 PM	Tube furnace set to 0
8/21/2010	2:06:59 PM	Run finished at 2:06 PM
8/21/2010	2:06:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/21/2010	2:41:04 PM	Bypass valve closed
8/21/2010	2:41:07 PM	Main Vac valve closed
8/21/2010	2:41:35 PM	Main Vac valve opened
8/21/2010	2:42:55 PM	Recipe started at 2:42 PM
8/21/2010	2:42:55 PM	Helium valve closed
8/21/2010	2:42:55 PM	BCl3 valve closed
8/21/2010	2:42:55 PM	PH3 valve closed
8/21/2010	2:42:55 PM	SiCl4 pre valve closed
8/21/2010	2:42:55 PM	SiCl4 post valve closed
8/21/2010	2:42:55 PM	Main Vac valve closed
8/21/2010	2:42:55 PM	Bypass valve closed
8/21/2010	2:42:55 PM	Bubbler valve closed
8/21/2010	2:42:55 PM	H2 valve opened
8/21/2010	2:42:55 PM	Helium MFC set to  0.000000
8/21/2010	2:42:55 PM	H2 MFC set to  500.000000
8/21/2010	2:42:55 PM	BCl3 MFC set to  0.000000
8/21/2010	2:42:55 PM	PHl3 MFC set to  0.000000
8/21/2010	2:42:55 PM	SiCl4 MFC set to  0.000000
8/21/2010	2:42:55 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	2:42:55 PM	Tube furnace set to 0
8/21/2010	2:44:18 PM	Helium valve closed
8/21/2010	2:44:18 PM	BCl3 valve closed
8/21/2010	2:44:18 PM	PH3 valve closed
8/21/2010	2:44:18 PM	SiCl4 pre valve closed
8/21/2010	2:44:18 PM	SiCl4 post valve closed
8/21/2010	2:44:18 PM	Main Vac valve closed
8/21/2010	2:44:18 PM	Bypass valve closed
8/21/2010	2:44:18 PM	H2 valve opened
8/21/2010	2:44:18 PM	Bubbler valve opened
8/21/2010	2:44:18 PM	Helium MFC set to  0.000000
8/21/2010	2:44:18 PM	H2 MFC set to  500.000000
8/21/2010	2:44:18 PM	BCl3 MFC set to  0.000000
8/21/2010	2:44:18 PM	PHl3 MFC set to  0.000000
8/21/2010	2:44:18 PM	SiCl4 MFC set to  0.000000
8/21/2010	2:44:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	2:44:18 PM	Tube furnace set to 1000
8/21/2010	3:04:18 PM	Helium valve closed
8/21/2010	3:04:18 PM	BCl3 valve closed
8/21/2010	3:04:18 PM	SiCl4 pre valve closed
8/21/2010	3:04:18 PM	SiCl4 post valve closed
8/21/2010	3:04:18 PM	Main Vac valve closed
8/21/2010	3:04:18 PM	Bypass valve closed
8/21/2010	3:04:18 PM	H2 valve opened
8/21/2010	3:04:18 PM	PH3 valve opened
8/21/2010	3:04:18 PM	Bubbler valve opened
8/21/2010	3:04:18 PM	Helium MFC set to  0.000000
8/21/2010	3:04:18 PM	H2 MFC set to  500.000000
8/21/2010	3:04:18 PM	BCl3 MFC set to  0.000000
8/21/2010	3:04:18 PM	PHl3 MFC set to  1.000000
8/21/2010	3:04:18 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:04:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:04:18 PM	Tube furnace set to 1000
8/21/2010	3:24:18 PM	H2 valve closed
8/21/2010	3:24:18 PM	BCl3 valve closed
8/21/2010	3:24:18 PM	PH3 valve closed
8/21/2010	3:24:18 PM	SiCl4 pre valve closed
8/21/2010	3:24:18 PM	SiCl4 post valve closed
8/21/2010	3:24:18 PM	Main Vac valve closed
8/21/2010	3:24:18 PM	Bypass valve closed
8/21/2010	3:24:18 PM	Helium valve opened
8/21/2010	3:24:18 PM	Bubbler valve opened
8/21/2010	3:24:18 PM	Helium MFC set to  500.000000
8/21/2010	3:24:18 PM	H2 MFC set to  0.000000
8/21/2010	3:24:18 PM	BCl3 MFC set to  0.000000
8/21/2010	3:24:18 PM	PHl3 MFC set to  0.000000
8/21/2010	3:24:18 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:24:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:24:18 PM	Tube furnace set to 0
8/21/2010	3:44:18 PM	Helium valve closed
8/21/2010	3:44:18 PM	H2 valve closed
8/21/2010	3:44:18 PM	BCl3 valve closed
8/21/2010	3:44:18 PM	PH3 valve closed
8/21/2010	3:44:18 PM	SiCl4 pre valve closed
8/21/2010	3:44:18 PM	SiCl4 post valve closed
8/21/2010	3:44:18 PM	Main Vac valve closed
8/21/2010	3:44:18 PM	Bypass valve closed
8/21/2010	3:44:18 PM	Bubbler valve closed
8/21/2010	3:44:18 PM	Helium MFC set to  0.000000
8/21/2010	3:44:18 PM	H2 MFC set to  0.000000
8/21/2010	3:44:18 PM	BCl3 MFC set to  0.000000
8/21/2010	3:44:18 PM	PHl3 MFC set to  0.000000
8/21/2010	3:44:18 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:44:18 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:44:19 PM	Tube furnace set to 0
8/21/2010	3:44:19 PM	Run finished at 3:44 PM
8/21/2010	3:53:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2010	3:53:17 PM	Recipe started at 3:53 PM
8/21/2010	3:53:17 PM	Helium valve closed
8/21/2010	3:53:17 PM	H2 valve closed
8/21/2010	3:53:17 PM	BCl3 valve closed
8/21/2010	3:53:17 PM	PH3 valve closed
8/21/2010	3:53:17 PM	SiCl4 pre valve closed
8/21/2010	3:53:17 PM	SiCl4 post valve closed
8/21/2010	3:53:17 PM	Main Vac valve closed
8/21/2010	3:53:17 PM	Bubbler valve closed
8/21/2010	3:53:17 PM	Bypass valve opened
8/21/2010	3:53:17 PM	Helium MFC set to  0.000000
8/21/2010	3:53:17 PM	H2 MFC set to  0.000000
8/21/2010	3:53:17 PM	BCl3 MFC set to  0.000000
8/21/2010	3:53:17 PM	PHl3 MFC set to  0.000000
8/21/2010	3:53:17 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:53:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:53:17 PM	Tube furnace set to 0
8/21/2010	3:53:55 PM	Helium valve closed
8/21/2010	3:53:55 PM	H2 valve closed
8/21/2010	3:53:55 PM	BCl3 valve closed
8/21/2010	3:53:55 PM	PH3 valve closed
8/21/2010	3:53:55 PM	SiCl4 pre valve closed
8/21/2010	3:53:55 PM	SiCl4 post valve closed
8/21/2010	3:53:55 PM	Bubbler valve closed
8/21/2010	3:53:55 PM	Main Vac valve opened
8/21/2010	3:53:55 PM	Bypass valve opened
8/21/2010	3:53:55 PM	Helium MFC set to  0.000000
8/21/2010	3:53:55 PM	H2 MFC set to  0.000000
8/21/2010	3:53:55 PM	BCl3 MFC set to  0.000000
8/21/2010	3:53:55 PM	PHl3 MFC set to  0.000000
8/21/2010	3:53:55 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:53:55 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:53:55 PM	Tube furnace set to 0
8/21/2010	3:53:55 PM	Run finished at 3:53 PM
8/21/2010	3:53:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2010	3:54:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/21/2010	3:55:05 PM	Recipe started at 3:55 PM
8/21/2010	3:55:05 PM	H2 valve closed
8/21/2010	3:55:05 PM	BCl3 valve closed
8/21/2010	3:55:05 PM	PH3 valve closed
8/21/2010	3:55:05 PM	SiCl4 pre valve closed
8/21/2010	3:55:05 PM	SiCl4 post valve closed
8/21/2010	3:55:05 PM	Main Vac valve closed
8/21/2010	3:55:05 PM	Bypass valve closed
8/21/2010	3:55:05 PM	Bubbler valve closed
8/21/2010	3:55:05 PM	Helium valve opened
8/21/2010	3:55:05 PM	Helium MFC set to  500.000000
8/21/2010	3:55:05 PM	H2 MFC set to  0.000000
8/21/2010	3:55:05 PM	BCl3 MFC set to  0.000000
8/21/2010	3:55:05 PM	PHl3 MFC set to  0.000000
8/21/2010	3:55:05 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:55:05 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:55:05 PM	Tube furnace set to 0
8/21/2010	3:56:26 PM	Helium valve closed
8/21/2010	3:56:26 PM	H2 valve closed
8/21/2010	3:56:26 PM	BCl3 valve closed
8/21/2010	3:56:26 PM	PH3 valve closed
8/21/2010	3:56:26 PM	SiCl4 pre valve closed
8/21/2010	3:56:26 PM	SiCl4 post valve closed
8/21/2010	3:56:26 PM	Main Vac valve closed
8/21/2010	3:56:26 PM	Bypass valve closed
8/21/2010	3:56:26 PM	Bubbler valve closed
8/21/2010	3:56:26 PM	Helium MFC set to  0.000000
8/21/2010	3:56:26 PM	H2 MFC set to  0.000000
8/21/2010	3:56:26 PM	BCl3 MFC set to  0.000000
8/21/2010	3:56:26 PM	PHl3 MFC set to  0.000000
8/21/2010	3:56:26 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:56:26 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:56:26 PM	Tube furnace set to 0
8/21/2010	3:56:41 PM	Helium valve closed
8/21/2010	3:56:41 PM	H2 valve closed
8/21/2010	3:56:41 PM	BCl3 valve closed
8/21/2010	3:56:41 PM	PH3 valve closed
8/21/2010	3:56:41 PM	SiCl4 pre valve closed
8/21/2010	3:56:41 PM	SiCl4 post valve closed
8/21/2010	3:56:41 PM	Main Vac valve closed
8/21/2010	3:56:41 PM	Bubbler valve closed
8/21/2010	3:56:41 PM	Bypass valve opened
8/21/2010	3:56:41 PM	Helium MFC set to  0.000000
8/21/2010	3:56:41 PM	H2 MFC set to  0.000000
8/21/2010	3:56:41 PM	BCl3 MFC set to  0.000000
8/21/2010	3:56:41 PM	PHl3 MFC set to  0.000000
8/21/2010	3:56:41 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:56:41 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:56:41 PM	Tube furnace set to 0
8/21/2010	3:57:09 PM	Helium valve closed
8/21/2010	3:57:09 PM	H2 valve closed
8/21/2010	3:57:09 PM	BCl3 valve closed
8/21/2010	3:57:09 PM	PH3 valve closed
8/21/2010	3:57:09 PM	SiCl4 pre valve closed
8/21/2010	3:57:09 PM	SiCl4 post valve closed
8/21/2010	3:57:09 PM	Bubbler valve closed
8/21/2010	3:57:09 PM	Main Vac valve opened
8/21/2010	3:57:09 PM	Bypass valve opened
8/21/2010	3:57:09 PM	Helium MFC set to  0.000000
8/21/2010	3:57:09 PM	H2 MFC set to  0.000000
8/21/2010	3:57:09 PM	BCl3 MFC set to  0.000000
8/21/2010	3:57:09 PM	PHl3 MFC set to  0.000000
8/21/2010	3:57:09 PM	SiCl4 MFC set to  0.000000
8/21/2010	3:57:09 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	3:57:09 PM	Tube furnace set to 0
8/21/2010	4:02:09 PM	H2 valve closed
8/21/2010	4:02:09 PM	BCl3 valve closed
8/21/2010	4:02:09 PM	PH3 valve closed
8/21/2010	4:02:09 PM	SiCl4 pre valve closed
8/21/2010	4:02:09 PM	SiCl4 post valve closed
8/21/2010	4:02:09 PM	Main Vac valve closed
8/21/2010	4:02:09 PM	Bypass valve closed
8/21/2010	4:02:09 PM	Bubbler valve closed
8/21/2010	4:02:09 PM	Helium valve opened
8/21/2010	4:02:09 PM	Helium MFC set to  500.000000
8/21/2010	4:02:09 PM	H2 MFC set to  0.000000
8/21/2010	4:02:09 PM	BCl3 MFC set to  0.000000
8/21/2010	4:02:09 PM	PHl3 MFC set to  0.000000
8/21/2010	4:02:09 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:02:09 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:02:09 PM	Tube furnace set to 0
8/21/2010	4:03:30 PM	Helium valve closed
8/21/2010	4:03:30 PM	H2 valve closed
8/21/2010	4:03:30 PM	BCl3 valve closed
8/21/2010	4:03:30 PM	PH3 valve closed
8/21/2010	4:03:30 PM	SiCl4 pre valve closed
8/21/2010	4:03:30 PM	SiCl4 post valve closed
8/21/2010	4:03:30 PM	Main Vac valve closed
8/21/2010	4:03:30 PM	Bypass valve closed
8/21/2010	4:03:30 PM	Bubbler valve closed
8/21/2010	4:03:30 PM	Helium MFC set to  0.000000
8/21/2010	4:03:30 PM	H2 MFC set to  0.000000
8/21/2010	4:03:30 PM	BCl3 MFC set to  0.000000
8/21/2010	4:03:30 PM	PHl3 MFC set to  0.000000
8/21/2010	4:03:30 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:03:30 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:03:31 PM	Tube furnace set to 0
8/21/2010	4:03:46 PM	Helium valve closed
8/21/2010	4:03:46 PM	H2 valve closed
8/21/2010	4:03:46 PM	BCl3 valve closed
8/21/2010	4:03:46 PM	PH3 valve closed
8/21/2010	4:03:46 PM	SiCl4 pre valve closed
8/21/2010	4:03:46 PM	SiCl4 post valve closed
8/21/2010	4:03:46 PM	Main Vac valve closed
8/21/2010	4:03:46 PM	Bubbler valve closed
8/21/2010	4:03:46 PM	Bypass valve opened
8/21/2010	4:03:46 PM	Helium MFC set to  0.000000
8/21/2010	4:03:46 PM	H2 MFC set to  0.000000
8/21/2010	4:03:46 PM	BCl3 MFC set to  0.000000
8/21/2010	4:03:46 PM	PHl3 MFC set to  0.000000
8/21/2010	4:03:46 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:03:46 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:03:46 PM	Tube furnace set to 0
8/21/2010	4:04:14 PM	Helium valve closed
8/21/2010	4:04:14 PM	H2 valve closed
8/21/2010	4:04:14 PM	BCl3 valve closed
8/21/2010	4:04:14 PM	PH3 valve closed
8/21/2010	4:04:14 PM	SiCl4 pre valve closed
8/21/2010	4:04:14 PM	SiCl4 post valve closed
8/21/2010	4:04:14 PM	Bubbler valve closed
8/21/2010	4:04:14 PM	Main Vac valve opened
8/21/2010	4:04:14 PM	Bypass valve opened
8/21/2010	4:04:14 PM	Helium MFC set to  0.000000
8/21/2010	4:04:14 PM	H2 MFC set to  0.000000
8/21/2010	4:04:14 PM	BCl3 MFC set to  0.000000
8/21/2010	4:04:14 PM	PHl3 MFC set to  0.000000
8/21/2010	4:04:14 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:04:14 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:04:14 PM	Tube furnace set to 0
8/21/2010	4:09:14 PM	H2 valve closed
8/21/2010	4:09:14 PM	BCl3 valve closed
8/21/2010	4:09:14 PM	PH3 valve closed
8/21/2010	4:09:14 PM	SiCl4 pre valve closed
8/21/2010	4:09:14 PM	SiCl4 post valve closed
8/21/2010	4:09:14 PM	Main Vac valve closed
8/21/2010	4:09:14 PM	Bypass valve closed
8/21/2010	4:09:14 PM	Bubbler valve closed
8/21/2010	4:09:14 PM	Helium valve opened
8/21/2010	4:09:14 PM	Helium MFC set to  500.000000
8/21/2010	4:09:14 PM	H2 MFC set to  0.000000
8/21/2010	4:09:14 PM	BCl3 MFC set to  0.000000
8/21/2010	4:09:14 PM	PHl3 MFC set to  0.000000
8/21/2010	4:09:14 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:09:14 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:09:14 PM	Tube furnace set to 0
8/21/2010	4:09:45 PM	Helium valve closed
8/21/2010	4:09:45 PM	H2 valve closed
8/21/2010	4:09:45 PM	BCl3 valve closed
8/21/2010	4:09:45 PM	PH3 valve closed
8/21/2010	4:09:45 PM	SiCl4 pre valve closed
8/21/2010	4:09:45 PM	SiCl4 post valve closed
8/21/2010	4:09:45 PM	Main Vac valve closed
8/21/2010	4:09:45 PM	Bypass valve closed
8/21/2010	4:09:45 PM	Bubbler valve closed
8/21/2010	4:09:45 PM	Helium MFC set to  0.000000
8/21/2010	4:09:45 PM	H2 MFC set to  0.000000
8/21/2010	4:09:45 PM	BCl3 MFC set to  0.000000
8/21/2010	4:09:45 PM	PHl3 MFC set to  0.000000
8/21/2010	4:09:45 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:09:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:09:45 PM	Tube furnace set to 0
8/21/2010	4:09:51 PM	Helium valve closed
8/21/2010	4:09:51 PM	H2 valve closed
8/21/2010	4:09:51 PM	BCl3 valve closed
8/21/2010	4:09:51 PM	PH3 valve closed
8/21/2010	4:09:51 PM	SiCl4 pre valve closed
8/21/2010	4:09:51 PM	SiCl4 post valve closed
8/21/2010	4:09:51 PM	Main Vac valve closed
8/21/2010	4:09:51 PM	Bubbler valve closed
8/21/2010	4:09:51 PM	Bypass valve opened
8/21/2010	4:09:51 PM	Helium MFC set to  0.000000
8/21/2010	4:09:51 PM	H2 MFC set to  0.000000
8/21/2010	4:09:51 PM	BCl3 MFC set to  0.000000
8/21/2010	4:09:51 PM	PHl3 MFC set to  0.000000
8/21/2010	4:09:51 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:09:51 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:09:51 PM	Tube furnace set to 0
8/21/2010	4:10:12 PM	Helium valve closed
8/21/2010	4:10:12 PM	H2 valve closed
8/21/2010	4:10:12 PM	BCl3 valve closed
8/21/2010	4:10:12 PM	PH3 valve closed
8/21/2010	4:10:12 PM	SiCl4 pre valve closed
8/21/2010	4:10:12 PM	SiCl4 post valve closed
8/21/2010	4:10:12 PM	Bubbler valve closed
8/21/2010	4:10:12 PM	Main Vac valve opened
8/21/2010	4:10:12 PM	Bypass valve opened
8/21/2010	4:10:12 PM	Helium MFC set to  0.000000
8/21/2010	4:10:12 PM	H2 MFC set to  0.000000
8/21/2010	4:10:12 PM	BCl3 MFC set to  0.000000
8/21/2010	4:10:12 PM	PHl3 MFC set to  0.000000
8/21/2010	4:10:12 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:10:12 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:10:12 PM	Tube furnace set to 0
8/21/2010	4:10:16 PM	Run aborted at 4:10 PM
8/21/2010	4:10:16 PM	Helium valve closed
8/21/2010	4:10:16 PM	H2 valve closed
8/21/2010	4:10:16 PM	BCl3 valve closed
8/21/2010	4:10:16 PM	PH3 valve closed
8/21/2010	4:10:16 PM	SiCl4 pre valve closed
8/21/2010	4:10:16 PM	SiCl4 post valve closed
8/21/2010	4:10:16 PM	Bypass valve closed
8/21/2010	4:10:16 PM	Main Vac valve closed
8/21/2010	4:10:16 PM	Bubbler valve closed
8/21/2010	4:10:16 PM	Helium MFC set to  0.000000
8/21/2010	4:10:16 PM	H2 MFC set to  0.000000
8/21/2010	4:10:16 PM	BCl3 MFC set to  0.000000
8/21/2010	4:10:16 PM	PHl3 MFC set to  0.000000
8/21/2010	4:10:16 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:10:16 PM	Tube furnace set to 0
8/21/2010	4:10:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
8/21/2010	4:10:18 PM	Bypass valve opened
8/21/2010	4:10:18 PM	Main Vac valve opened
8/21/2010	4:10:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/21/2010	4:10:44 PM	Recipe started at 4:10 PM
8/21/2010	4:10:45 PM	Helium valve closed
8/21/2010	4:10:45 PM	H2 valve closed
8/21/2010	4:10:45 PM	BCl3 valve closed
8/21/2010	4:10:45 PM	PH3 valve closed
8/21/2010	4:10:45 PM	SiCl4 pre valve closed
8/21/2010	4:10:45 PM	SiCl4 post valve closed
8/21/2010	4:10:45 PM	Main Vac valve closed
8/21/2010	4:10:45 PM	Bubbler valve closed
8/21/2010	4:10:45 PM	Bypass valve opened
8/21/2010	4:10:45 PM	Helium MFC set to  0.000000
8/21/2010	4:10:45 PM	H2 MFC set to  0.000000
8/21/2010	4:10:45 PM	BCl3 MFC set to  0.000000
8/21/2010	4:10:45 PM	PHl3 MFC set to  0.000000
8/21/2010	4:10:45 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:10:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:10:45 PM	Tube furnace set to 0
8/21/2010	4:10:45 PM	Helium valve closed
8/21/2010	4:10:45 PM	H2 valve closed
8/21/2010	4:10:45 PM	BCl3 valve closed
8/21/2010	4:10:45 PM	PH3 valve closed
8/21/2010	4:10:45 PM	SiCl4 pre valve closed
8/21/2010	4:10:45 PM	SiCl4 post valve closed
8/21/2010	4:10:45 PM	Bubbler valve closed
8/21/2010	4:10:45 PM	Main Vac valve opened
8/21/2010	4:10:45 PM	Bypass valve opened
8/21/2010	4:10:45 PM	Helium MFC set to  0.000000
8/21/2010	4:10:45 PM	H2 MFC set to  0.000000
8/21/2010	4:10:45 PM	BCl3 MFC set to  0.000000
8/21/2010	4:10:45 PM	PHl3 MFC set to  0.000000
8/21/2010	4:10:45 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:10:45 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:10:45 PM	Tube furnace set to 0
8/21/2010	4:10:55 PM	H2 valve closed
8/21/2010	4:10:55 PM	BCl3 valve closed
8/21/2010	4:10:55 PM	PH3 valve closed
8/21/2010	4:10:55 PM	SiCl4 pre valve closed
8/21/2010	4:10:55 PM	SiCl4 post valve closed
8/21/2010	4:10:55 PM	Bubbler valve closed
8/21/2010	4:10:55 PM	Helium valve opened
8/21/2010	4:10:55 PM	Main Vac valve opened
8/21/2010	4:10:55 PM	Bypass valve opened
8/21/2010	4:10:55 PM	Helium MFC set to  100.000000
8/21/2010	4:10:55 PM	H2 MFC set to  0.000000
8/21/2010	4:10:55 PM	BCl3 MFC set to  0.000000
8/21/2010	4:10:55 PM	PHl3 MFC set to  0.000000
8/21/2010	4:10:55 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:10:55 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:10:56 PM	Tube furnace set to 0
8/21/2010	4:19:56 PM	Helium valve closed
8/21/2010	4:19:56 PM	H2 valve closed
8/21/2010	4:19:56 PM	BCl3 valve closed
8/21/2010	4:19:56 PM	PH3 valve closed
8/21/2010	4:19:56 PM	SiCl4 pre valve closed
8/21/2010	4:19:56 PM	SiCl4 post valve closed
8/21/2010	4:19:56 PM	Bubbler valve closed
8/21/2010	4:19:56 PM	Main Vac valve opened
8/21/2010	4:19:56 PM	Bypass valve opened
8/21/2010	4:19:56 PM	Helium MFC set to  0.000000
8/21/2010	4:19:56 PM	H2 MFC set to  0.000000
8/21/2010	4:19:56 PM	BCl3 MFC set to  0.000000
8/21/2010	4:19:56 PM	PHl3 MFC set to  0.000000
8/21/2010	4:19:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:19:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:19:56 PM	Tube furnace set to 0
8/21/2010	4:20:56 PM	H2 valve closed
8/21/2010	4:20:56 PM	BCl3 valve closed
8/21/2010	4:20:56 PM	PH3 valve closed
8/21/2010	4:20:56 PM	SiCl4 pre valve closed
8/21/2010	4:20:56 PM	SiCl4 post valve closed
8/21/2010	4:20:56 PM	Bubbler valve closed
8/21/2010	4:20:56 PM	Helium valve opened
8/21/2010	4:20:56 PM	Main Vac valve opened
8/21/2010	4:20:56 PM	Bypass valve opened
8/21/2010	4:20:56 PM	Helium MFC set to  100.000000
8/21/2010	4:20:56 PM	H2 MFC set to  0.000000
8/21/2010	4:20:56 PM	BCl3 MFC set to  0.000000
8/21/2010	4:20:56 PM	PHl3 MFC set to  0.000000
8/21/2010	4:20:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:20:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:20:56 PM	Tube furnace set to 0
8/21/2010	4:29:56 PM	Helium valve closed
8/21/2010	4:29:56 PM	H2 valve closed
8/21/2010	4:29:56 PM	BCl3 valve closed
8/21/2010	4:29:56 PM	PH3 valve closed
8/21/2010	4:29:56 PM	SiCl4 pre valve closed
8/21/2010	4:29:56 PM	SiCl4 post valve closed
8/21/2010	4:29:56 PM	Bubbler valve closed
8/21/2010	4:29:56 PM	Main Vac valve opened
8/21/2010	4:29:56 PM	Bypass valve opened
8/21/2010	4:29:56 PM	Helium MFC set to  0.000000
8/21/2010	4:29:56 PM	H2 MFC set to  0.000000
8/21/2010	4:29:56 PM	BCl3 MFC set to  0.000000
8/21/2010	4:29:56 PM	PHl3 MFC set to  0.000000
8/21/2010	4:29:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:29:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:29:56 PM	Tube furnace set to 0
8/21/2010	4:30:56 PM	H2 valve closed
8/21/2010	4:30:56 PM	BCl3 valve closed
8/21/2010	4:30:56 PM	PH3 valve closed
8/21/2010	4:30:56 PM	SiCl4 pre valve closed
8/21/2010	4:30:56 PM	SiCl4 post valve closed
8/21/2010	4:30:56 PM	Bubbler valve closed
8/21/2010	4:30:56 PM	Helium valve opened
8/21/2010	4:30:56 PM	Main Vac valve opened
8/21/2010	4:30:56 PM	Bypass valve opened
8/21/2010	4:30:56 PM	Helium MFC set to  100.000000
8/21/2010	4:30:56 PM	H2 MFC set to  0.000000
8/21/2010	4:30:56 PM	BCl3 MFC set to  0.000000
8/21/2010	4:30:56 PM	PHl3 MFC set to  0.000000
8/21/2010	4:30:56 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:30:56 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:30:57 PM	Tube furnace set to 0
8/21/2010	4:39:57 PM	Helium valve closed
8/21/2010	4:39:57 PM	H2 valve closed
8/21/2010	4:39:57 PM	BCl3 valve closed
8/21/2010	4:39:57 PM	PH3 valve closed
8/21/2010	4:39:57 PM	SiCl4 pre valve closed
8/21/2010	4:39:57 PM	SiCl4 post valve closed
8/21/2010	4:39:57 PM	Bubbler valve closed
8/21/2010	4:39:57 PM	Main Vac valve opened
8/21/2010	4:39:57 PM	Bypass valve opened
8/21/2010	4:39:57 PM	Helium MFC set to  0.000000
8/21/2010	4:39:57 PM	H2 MFC set to  0.000000
8/21/2010	4:39:57 PM	BCl3 MFC set to  0.000000
8/21/2010	4:39:57 PM	PHl3 MFC set to  0.000000
8/21/2010	4:39:57 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:39:57 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:39:57 PM	Tube furnace set to 0
8/21/2010	4:39:58 PM	Run finished at 4:39 PM
8/21/2010	4:39:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/21/2010	4:48:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/21/2010	4:48:59 PM	Recipe started at 4:48 PM
8/21/2010	4:48:59 PM	Helium valve closed
8/21/2010	4:48:59 PM	H2 valve closed
8/21/2010	4:48:59 PM	BCl3 valve closed
8/21/2010	4:48:59 PM	PH3 valve closed
8/21/2010	4:48:59 PM	SiCl4 pre valve closed
8/21/2010	4:48:59 PM	SiCl4 post valve closed
8/21/2010	4:48:59 PM	Main Vac valve closed
8/21/2010	4:48:59 PM	Bubbler valve closed
8/21/2010	4:48:59 PM	Bypass valve opened
8/21/2010	4:48:59 PM	Helium MFC set to  0.000000
8/21/2010	4:48:59 PM	H2 MFC set to  0.000000
8/21/2010	4:48:59 PM	BCl3 MFC set to  0.000000
8/21/2010	4:48:59 PM	PHl3 MFC set to  0.000000
8/21/2010	4:48:59 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:48:59 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:48:59 PM	Tube furnace set to 0
8/21/2010	4:49:00 PM	Helium valve closed
8/21/2010	4:49:00 PM	H2 valve closed
8/21/2010	4:49:00 PM	BCl3 valve closed
8/21/2010	4:49:00 PM	PH3 valve closed
8/21/2010	4:49:00 PM	SiCl4 pre valve closed
8/21/2010	4:49:00 PM	SiCl4 post valve closed
8/21/2010	4:49:00 PM	Bubbler valve closed
8/21/2010	4:49:00 PM	Main Vac valve opened
8/21/2010	4:49:00 PM	Bypass valve opened
8/21/2010	4:49:00 PM	Helium MFC set to  0.000000
8/21/2010	4:49:00 PM	H2 MFC set to  0.000000
8/21/2010	4:49:00 PM	BCl3 MFC set to  0.000000
8/21/2010	4:49:00 PM	PHl3 MFC set to  0.000000
8/21/2010	4:49:00 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:49:00 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:49:00 PM	Tube furnace set to 0
8/21/2010	4:49:02 PM	H2 valve closed
8/21/2010	4:49:02 PM	BCl3 valve closed
8/21/2010	4:49:02 PM	PH3 valve closed
8/21/2010	4:49:02 PM	SiCl4 pre valve closed
8/21/2010	4:49:02 PM	SiCl4 post valve closed
8/21/2010	4:49:02 PM	Bubbler valve closed
8/21/2010	4:49:02 PM	Helium valve opened
8/21/2010	4:49:02 PM	Main Vac valve opened
8/21/2010	4:49:02 PM	Bypass valve opened
8/21/2010	4:49:02 PM	Helium MFC set to  100.000000
8/21/2010	4:49:02 PM	H2 MFC set to  0.000000
8/21/2010	4:49:02 PM	BCl3 MFC set to  0.000000
8/21/2010	4:49:02 PM	PHl3 MFC set to  0.000000
8/21/2010	4:49:02 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:49:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:49:02 PM	Tube furnace set to 0
8/21/2010	4:58:02 PM	Helium valve closed
8/21/2010	4:58:02 PM	H2 valve closed
8/21/2010	4:58:02 PM	BCl3 valve closed
8/21/2010	4:58:02 PM	PH3 valve closed
8/21/2010	4:58:02 PM	SiCl4 pre valve closed
8/21/2010	4:58:02 PM	SiCl4 post valve closed
8/21/2010	4:58:02 PM	Bubbler valve closed
8/21/2010	4:58:02 PM	Main Vac valve opened
8/21/2010	4:58:02 PM	Bypass valve opened
8/21/2010	4:58:02 PM	Helium MFC set to  0.000000
8/21/2010	4:58:02 PM	H2 MFC set to  0.000000
8/21/2010	4:58:02 PM	BCl3 MFC set to  0.000000
8/21/2010	4:58:02 PM	PHl3 MFC set to  0.000000
8/21/2010	4:58:02 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:58:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:58:02 PM	Tube furnace set to 0
8/21/2010	4:59:02 PM	H2 valve closed
8/21/2010	4:59:02 PM	BCl3 valve closed
8/21/2010	4:59:02 PM	PH3 valve closed
8/21/2010	4:59:02 PM	SiCl4 pre valve closed
8/21/2010	4:59:02 PM	SiCl4 post valve closed
8/21/2010	4:59:02 PM	Bubbler valve closed
8/21/2010	4:59:02 PM	Helium valve opened
8/21/2010	4:59:02 PM	Main Vac valve opened
8/21/2010	4:59:02 PM	Bypass valve opened
8/21/2010	4:59:02 PM	Helium MFC set to  100.000000
8/21/2010	4:59:02 PM	H2 MFC set to  0.000000
8/21/2010	4:59:02 PM	BCl3 MFC set to  0.000000
8/21/2010	4:59:02 PM	PHl3 MFC set to  0.000000
8/21/2010	4:59:02 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:59:02 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:59:03 PM	Tube furnace set to 0
8/21/2010	4:59:40 PM	Helium valve closed
8/21/2010	4:59:40 PM	H2 valve closed
8/21/2010	4:59:40 PM	BCl3 valve closed
8/21/2010	4:59:40 PM	PH3 valve closed
8/21/2010	4:59:40 PM	SiCl4 pre valve closed
8/21/2010	4:59:40 PM	SiCl4 post valve closed
8/21/2010	4:59:40 PM	Bubbler valve closed
8/21/2010	4:59:40 PM	Main Vac valve opened
8/21/2010	4:59:40 PM	Bypass valve opened
8/21/2010	4:59:40 PM	Helium MFC set to  0.000000
8/21/2010	4:59:40 PM	H2 MFC set to  0.000000
8/21/2010	4:59:40 PM	BCl3 MFC set to  0.000000
8/21/2010	4:59:40 PM	PHl3 MFC set to  0.000000
8/21/2010	4:59:40 PM	SiCl4 MFC set to  0.000000
8/21/2010	4:59:40 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	4:59:41 PM	Tube furnace set to 0
8/21/2010	5:00:19 PM	Run aborted at 5:00 PM
8/21/2010	5:00:19 PM	Helium valve closed
8/21/2010	5:00:19 PM	H2 valve closed
8/21/2010	5:00:19 PM	BCl3 valve closed
8/21/2010	5:00:19 PM	PH3 valve closed
8/21/2010	5:00:19 PM	SiCl4 pre valve closed
8/21/2010	5:00:19 PM	SiCl4 post valve closed
8/21/2010	5:00:19 PM	Bypass valve closed
8/21/2010	5:00:19 PM	Main Vac valve closed
8/21/2010	5:00:19 PM	Bubbler valve closed
8/21/2010	5:00:19 PM	Helium MFC set to  0.000000
8/21/2010	5:00:19 PM	H2 MFC set to  0.000000
8/21/2010	5:00:19 PM	BCl3 MFC set to  0.000000
8/21/2010	5:00:19 PM	PHl3 MFC set to  0.000000
8/21/2010	5:00:19 PM	SiCl4 MFC set to  0.000000
8/21/2010	5:00:19 PM	Tube furnace set to 0
8/21/2010	5:00:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_helium_purge.xml
8/21/2010	5:00:21 PM	Bypass valve opened
8/21/2010	5:00:22 PM	Main Vac valve opened
8/21/2010	9:13:53 PM	Recipe started at 9:13 PM
8/21/2010	9:13:53 PM	Helium valve closed
8/21/2010	9:13:53 PM	BCl3 valve closed
8/21/2010	9:13:53 PM	PH3 valve closed
8/21/2010	9:13:53 PM	SiCl4 pre valve closed
8/21/2010	9:13:53 PM	SiCl4 post valve closed
8/21/2010	9:13:53 PM	Main Vac valve closed
8/21/2010	9:13:53 PM	Bypass valve closed
8/21/2010	9:13:53 PM	Bubbler valve closed
8/21/2010	9:13:53 PM	H2 valve opened
8/21/2010	9:13:53 PM	Helium MFC set to  0.000000
8/21/2010	9:13:53 PM	H2 MFC set to  500.000000
8/21/2010	9:13:53 PM	BCl3 MFC set to  0.000000
8/21/2010	9:13:53 PM	PHl3 MFC set to  0.000000
8/21/2010	9:13:53 PM	SiCl4 MFC set to  0.000000
8/21/2010	9:13:53 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	9:13:53 PM	Tube furnace set to 0
8/21/2010	9:15:16 PM	Helium valve closed
8/21/2010	9:15:16 PM	BCl3 valve closed
8/21/2010	9:15:16 PM	PH3 valve closed
8/21/2010	9:15:16 PM	SiCl4 pre valve closed
8/21/2010	9:15:16 PM	SiCl4 post valve closed
8/21/2010	9:15:16 PM	Main Vac valve closed
8/21/2010	9:15:16 PM	Bypass valve closed
8/21/2010	9:15:16 PM	H2 valve opened
8/21/2010	9:15:16 PM	Bubbler valve opened
8/21/2010	9:15:16 PM	Helium MFC set to  0.000000
8/21/2010	9:15:16 PM	H2 MFC set to  500.000000
8/21/2010	9:15:16 PM	BCl3 MFC set to  0.000000
8/21/2010	9:15:16 PM	PHl3 MFC set to  0.000000
8/21/2010	9:15:16 PM	SiCl4 MFC set to  0.000000
8/21/2010	9:15:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	9:15:17 PM	Tube furnace set to 1000
8/21/2010	9:35:16 PM	Helium valve closed
8/21/2010	9:35:16 PM	BCl3 valve closed
8/21/2010	9:35:16 PM	Main Vac valve closed
8/21/2010	9:35:16 PM	Bypass valve closed
8/21/2010	9:35:16 PM	H2 valve opened
8/21/2010	9:35:17 PM	PH3 valve opened
8/21/2010	9:35:17 PM	SiCl4 pre valve opened
8/21/2010	9:35:17 PM	SiCl4 post valve opened
8/21/2010	9:35:17 PM	Bubbler valve opened
8/21/2010	9:35:17 PM	Helium MFC set to  0.000000
8/21/2010	9:35:17 PM	H2 MFC set to  500.000000
8/21/2010	9:35:17 PM	BCl3 MFC set to  0.000000
8/21/2010	9:35:17 PM	PHl3 MFC set to  1.000000
8/21/2010	9:35:17 PM	SiCl4 MFC set to  100.000000
8/21/2010	9:35:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	9:35:17 PM	Tube furnace set to 1000
8/21/2010	9:47:17 PM	H2 valve closed
8/21/2010	9:47:17 PM	BCl3 valve closed
8/21/2010	9:47:17 PM	PH3 valve closed
8/21/2010	9:47:17 PM	SiCl4 pre valve closed
8/21/2010	9:47:17 PM	SiCl4 post valve closed
8/21/2010	9:47:17 PM	Main Vac valve closed
8/21/2010	9:47:17 PM	Bypass valve closed
8/21/2010	9:47:17 PM	Helium valve opened
8/21/2010	9:47:17 PM	Bubbler valve opened
8/21/2010	9:47:17 PM	Helium MFC set to  500.000000
8/21/2010	9:47:17 PM	H2 MFC set to  0.000000
8/21/2010	9:47:17 PM	BCl3 MFC set to  0.000000
8/21/2010	9:47:17 PM	PHl3 MFC set to  0.000000
8/21/2010	9:47:17 PM	SiCl4 MFC set to  0.000000
8/21/2010	9:47:17 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	9:47:17 PM	Tube furnace set to 0
8/21/2010	10:06:32 PM	Helium valve closed
8/21/2010	10:06:32 PM	H2 valve closed
8/21/2010	10:06:32 PM	BCl3 valve closed
8/21/2010	10:06:32 PM	PH3 valve closed
8/21/2010	10:06:32 PM	SiCl4 pre valve closed
8/21/2010	10:06:32 PM	SiCl4 post valve closed
8/21/2010	10:06:32 PM	Main Vac valve closed
8/21/2010	10:06:32 PM	Bubbler valve closed
8/21/2010	10:06:32 PM	Bypass valve closed
8/21/2010	10:06:32 PM	Helium MFC set to  0.000000
8/21/2010	10:06:32 PM	H2 MFC set to  0.000000
8/21/2010	10:06:32 PM	BCl3 MFC set to  0.000000
8/21/2010	10:06:32 PM	PHl3 MFC set to  0.000000
8/21/2010	10:06:32 PM	SiCl4 MFC set to  0.000000
8/21/2010	10:06:32 PM	Bypass solenoid MFC set to  760.000000
8/21/2010	10:06:32 PM	Tube furnace set to 0
8/21/2010	10:06:32 PM	Baratron reads 741.318321 Torr and NaOH valve is open.  Emergency exit.
8/21/2010	10:06:56 PM	Run aborted at 10:06 PM
8/21/2010	10:09:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/21/2010	10:09:16 PM	Recipe started at 10:09 PM
8/21/2010	10:09:16 PM	Helium valve closed
8/21/2010	10:09:16 PM	H2 valve closed
8/21/2010	10:09:16 PM	BCl3 valve closed
8/21/2010	10:09:16 PM	PH3 valve closed
8/21/2010	10:09:16 PM	SiCl4 pre valve closed
8/21/2010	10:09:16 PM	SiCl4 post valve closed
8/21/2010	10:09:16 PM	Main Vac valve closed
8/21/2010	10:09:16 PM	Bubbler valve closed
8/21/2010	10:09:16 PM	Bypass valve opened
8/21/2010	10:09:16 PM	Helium MFC set to  0.000000
8/21/2010	10:09:16 PM	H2 MFC set to  0.000000
8/21/2010	10:09:16 PM	BCl3 MFC set to  0.000000
8/21/2010	10:09:16 PM	PHl3 MFC set to  0.000000
8/21/2010	10:09:16 PM	SiCl4 MFC set to  0.000000
8/21/2010	10:09:16 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	10:09:16 PM	Tube furnace set to 0
8/21/2010	10:09:54 PM	Helium valve closed
8/21/2010	10:09:54 PM	H2 valve closed
8/21/2010	10:09:54 PM	BCl3 valve closed
8/21/2010	10:09:54 PM	PH3 valve closed
8/21/2010	10:09:54 PM	SiCl4 pre valve closed
8/21/2010	10:09:54 PM	SiCl4 post valve closed
8/21/2010	10:09:54 PM	Bubbler valve closed
8/21/2010	10:09:54 PM	Main Vac valve opened
8/21/2010	10:09:54 PM	Bypass valve opened
8/21/2010	10:09:54 PM	Helium MFC set to  0.000000
8/21/2010	10:09:54 PM	H2 MFC set to  0.000000
8/21/2010	10:09:54 PM	BCl3 MFC set to  0.000000
8/21/2010	10:09:54 PM	PHl3 MFC set to  0.000000
8/21/2010	10:09:54 PM	SiCl4 MFC set to  0.000000
8/21/2010	10:09:54 PM	Bypass solenoid MFC set to  0.000000
8/21/2010	10:09:54 PM	Tube furnace set to 0
8/21/2010	10:09:54 PM	Run finished at 10:09 PM
8/21/2010	10:09:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
